Processing Effects for Integrated PZT: Residual Stress, Thickness, and Dielectric Properties

نویسندگان

  • Ryan J. Ong
  • David A. Payne
  • Nancy R. Sottos
چکیده

Processing effects on the dielectric properties of sol–gel-derived PbZrO3–PbTiO3 (PZT) films integrated onto Pt/Ti/SiO2//Si substrates are reported. Sol–gel synthesis and deposition conditions were designed to produce films of varying thickness (95–500 nm) with consistent chemical composition (Pb (Zr0.53Ti0.47)O3), phase content (perovskite), grain size (B110 nm), crystallographic orientation (nominally (111) fiber textured), and measured residual stress. The Stoney method, using laser reflectance to determine wafer curvature, derived biaxial tensile stress values of 150 and 180 MPa for PZT films after a baseline correction for electrode interactions during thermal processing was employed. The PZT films were of high dielectric quality, with low losses and negligible dispersion. Calculated values of dielectric constant ( K 0) were found to decrease from 960 to 600 with decreasing film thickness. A series-capacitor model successfully recovered a room-temperature K1 0 for the PZT (1,170) in good agreement with bulk reports but was unable to reproduce the expected dielectric anomaly near 3801C. This discrepancy and the resulting diffuse phase transformation were attributed to the biaxial tensile stress present in the PZT films.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Effect of Film Thickness on the Piezoelectric Properties of Lead Zirconate Titanate Thick Films Fabricated by Aerosol Deposition

Lead zirconate titanate (PZT) thick films with uniformly dispersed submicrometer pores were successfully fabricated on platinized silicon substrates with various thicknesses ranging from 1 lm to over 100 lm by aerosol deposition. Mixed powders of PZT and polyvinylidene fluoride (PVDF) were deposited for initial fabrication of composite films. After burn-out of the PVDF phase from the composite ...

متن کامل

Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films

Lead zirconate titanate ~PZT! thin films with a Zr/Ti ratio of 52/48 were deposited on platinized silicon substrates by a sol-gel method and crystallized with preferred ~111! or ~100! orientation. Both the piezoelectric properties (d33) and the field-induced strains of the films with different thickness and preferred orientation were measured by a laser Doppler heterodyne interferometer. The we...

متن کامل

COMPARISON OF MECHANICAL AND ELECTRICAL PROPERTIES OF PIEZOELECTRIC COMPOSITES PZT/ZnO AND PZT/Al FABRICATED BY POWDER METALLURGY

Lead zirconate titanate (PZT) as a piezoelectric ceramic has been used widely in the fields of electronics, biomedical engineering, mechatronics and thermoelectric. Although, the electrical properties of PZT ceramics is a major considerable, but the mechanical properties such as fracture strength and toughness should be improved for many applications. In this study, lead monoxide, zirconium ...

متن کامل

Effects of Residual Stress on the Electrical Properties of PZT Films

The effects of the residual stress (either compressive or tensile) induced during the heat-treatment process on the electrical properties of Pb(Zr0.52Ti0.48)O3 (PZT) films were investigated. The PZT films were deposited on platinized silicon substrates by the rf-magnetron sputtering method using a single oxide target. After their deposition, the films were bent elastically by means of a special...

متن کامل

Multilayer thin films with compositional PbZr0.52Ti0.48O3/Bi1.5Zn1.0Nb1.5O7 layers for tunable applications

The dielectric properties and tunability of multilayer thin films with compositional PbZr0.52Ti0.48O3/Bi1.5Zn1.0Nb1.5O7 (PZT/BZN) layers (PPBLs) fabricated by pulsed laser deposition on Pt/TiO2/SiO2/Si substrate have been investigated. Dielectric measurements indicate that the PZT/BZN bilayer thin films exhibit medium dielectric constant of about 490, low loss tangent of 0.017, and superior tun...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2005